Micro-mechanical device with non-evaporable getter
US5610438A · kind A · utility
308Cited by
71References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1995 |
| Grant date | Mar 11, 1997 |
| Priority date | — |
| Expiry date | Mar 8, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to micro-mechanical devices including actuators, motors and sensors with improved operating characteristics. A micro-mechanical device (10) comprising a DMD-type spatial light modulator with a getter (100) located within the package (52). The getter (100) is preferably specific to water, larger organic molecules, various gases, or other high surface energy substances. The getter is a non-evaporable getter (NEG) to permit the use of active metal getter systems without their evaporation on package surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.