Probe station having conductive coating added to thermal chuck insulator
US5610529A · kind A · utility
142Cited by
27References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 28, 1995 |
| Grant date | Mar 11, 1997 |
| Priority date | — |
| Expiry date | Apr 28, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R19/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe station suitable for low noise measurements includes a chuck for supporting a test device and a supporting surface for the test device. The probe station has means for controlling the temperature in the vicinity of the test device by sensing the temperature and, in response to the sensing, alternatively raising or lowering the temperature. At least two layers including a first electrically conductive layer adhered to an insulator layer are disposed between the supporting surface and the chuck. The electrically conductive layer is electrically connected to one of the chuck and supporting surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.