Displacement detection system
US5610719A · kind A · utility
42Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 10, 1995 |
| Grant date | Mar 11, 1997 |
| Priority date | — |
| Expiry date | Jul 10, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary image of the first grating reflected off the surface onto the second grating; and a detector, responsive to the fringe pattern formed after the secondary image passes through the second grating, for detecting displacement of the surface in a direction normal to the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.