Method of forming a thermally activated noise immune fuse
US5614440A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 11, 1995 |
| Grant date | Mar 25, 1997 |
| Priority date | — |
| Expiry date | Apr 11, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/055
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of fabricating a noise immune fuse having sub-micron dimensions which can be programmed by an electrically and thermally synchronized event. The fuse includes a pair of fuse links in close proximity of each other, a layer of thermally conductive and electrically insulating material thermally coupling the two links forming the pair, and means for programming the first link by prompting the second link to gate the energy transfer between the links via the coupling layer. By combining thermal and electrical pulses to perform the programming function, the reliability of the fuse structure is greatly enhanced when compared to that of a single element fuse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.