Differentiating mass spectrometer
US5619034A · kind A · utility
30Cited by
8References
31Claims
0Family size
Inventors
Key dates
| Filing date | Nov 15, 1995 |
| Grant date | Apr 8, 1997 |
| Priority date | — |
| Expiry date | Nov 15, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/40
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A Time of Flight Mass Spectrometer which features rastering the secondary beam on the surface and analyzing composition at each of the rastered locations thereby greatly increasing the rate of data throughput. The primary beam is rastered on the target surface and the secondary beam is rastered on the detector surface. The latter arrangement provides ways of interpreting data including mapping the distribution of selected species on the target surface. The secondary beam is generated from a gas. This latter arrangement is especially useful for studying reaction rams of mixtures of reactive gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.