Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube
US5625259A · kind A · utility
12Cited by
12References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 1995 |
| Grant date | Apr 29, 1997 |
| Priority date | — |
| Expiry date | Feb 16, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/28
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fluid-cooled plasma applicator for microwave absorbing fluids is described. The applicator includes a discharge tube substantially transparent to microwave energy and a cooling member surrounding the tube defining a channel and a medium. The channel is formed along an inner surface of the member and it encircles an outer surface of the tube for transporting a microwave absorbing cooling fluid over the outer surface of the tube. The medium adjacent to the channel allows an electric field to enter the tube and sustain a plasma in the tube while the fluid is flowing through the channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.