Monolithic, buried-substrate, ceramic multiple capacitors isolated, one to the next, by dual-dielectric-constant, three-layer-laminate isolation layers
US5625528A · kind A · utility
Inventors
Key dates
| Filing date | Sep 15, 1995 |
| Grant date | Apr 29, 1997 |
| Priority date | — |
| Expiry date | Sep 15, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A monolithic, buried-substrate, ceramic multiple capacitor is laid up as multiple capacitors that are isolated, one to the next, by a dual-dielectric-constant, three-layer-laminate, isolation layer. Each isolation layer has and presents (i) an innermost layer of a low dielectric constant (low K) material, located between (ii) outer laminate layers of a high dielectric constant (high K) material. By such construction negative effects of the physio-chemical reaction (i) occurring at the boundary between the high-K and low-K layers, (ii) contaminating the high-K dielectric and lowering its K, and (iii) undesirably serving both to lower the capacitance of any (buried substrate) capacitor that makes use of the ("contaminated") high-K dielectric while increasing capacitor leakage current, are mitigated or avoided. This occurs because the physio-chemical reaction zone, or band, located between the high-K dielectric layers (from which each buried-substrate capacitor is formed) and the low-K dielectric isolation layer (between successive capacitors) is moved slightly away from the region of the capacitor itself. Moreover, the ceramic multiple capacitor is strongly and stably fused together …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.