Semiconductor sensor having a protective layer

US5629538A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Uwe Lipphardt · Reutlingen, DE
• Guenther Findler · Stuttgart, DE
• Horst Muenzel · Reutlingen, DE
• Helmut Baumann · Gomaringen, DE

Key dates

• Filing date: May 3, 1995
• Grant date: May 13, 1997
• Expiry date: May 3, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/0627
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A semiconductor chip, which is preferably designed as a pressure sensor, has on its rear side one or more depressions in which the pressure is measured by correspondingly designed diaphragms which are coupled to piezosensitive circuits. The surface of the depressions and, optionally, the rear side of the semiconductor chip are coated with a protective layer which ensures that the semiconductor is protected from aggressive media. The protective layer thereby makes it possible to use the sensor universally in acids, lyes or hot gases.