Thin-film forming apparatus with magnetic bearings and a non-contact seal and drive
US5630881A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1994 |
| Grant date | May 20, 1997 |
| Priority date | — |
| Expiry date | Aug 12, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A thin-film forming device including a reaction chamber having an atmosphere different from that in the outside world, a susceptor rotatably disposed in the reaction chamber for mounting a substrate thereon to form a thin film thereon, and a nozzle disposed within the reaction chamber facing the susceptor for supplying a thin-film forming material on the substrate, the thin-film forming device comprises: a levitating means including magnetic bearings for non-contact support of the susceptor; and a driving means for rotating the susceptor at high speed, to thereby increase the rotational speed of the susceptor and the thin-film forming rate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.