Ceramic susceptor with embedded metal electrode and eutectic connection
US5633073A · kind A · utility
57Cited by
9References
5Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 14, 1995 |
| Grant date | May 27, 1997 |
| Priority date | — |
| Expiry date | Jul 14, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24917
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.