Method and apparatus for cleaning electronic parts
US5635053A · kind A · utility
59Cited by
1References
21Claims
0Family size
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Key dates
| Filing date | Oct 27, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Oct 27, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/36
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.