Micromechanical tuning fork angular rate sensor
US5635639A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical tuning fork gyroscope includes a suspended structure comprising at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis normal to the rotation sensitive axis. The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.