Resolution-enhancement device for an optically-coupled image sensor for an electron microscope
US5635720A · kind A · utility
18Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 3, 1995 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Oct 3, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2445
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus designed to be positioned in the projection chamber of an electron microscope to detect electron images and/or diffraction patterns from a sample and convert those electron images into light images is provided. The apparatus transfers light images to an imaging sensor for recording while enhancing resolution of the light images by absorbing substantially all laterally scattered light before it reaches the imaging sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.