Illumination optical apparatus and scanning exposure apparatus
US5636003A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1994 |
| Grant date | Jun 3, 1997 |
| Priority date | — |
| Expiry date | Dec 28, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.