Differential phase contrast inspection system with multiple detectors
US5638175A · kind A · utility
5Cited by
1References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 1995 |
| Grant date | Jun 10, 1997 |
| Priority date | — |
| Expiry date | Sep 19, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/52
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results. The systems makes use of a "black beam" at the optical axis of the system, and uses at least two detectors to determine the intensity of the light beam after passing through a work piece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.