Semiconductor film wafer cassette
US5638958A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 13, 1996 |
| Grant date | Jun 17, 1997 |
| Priority date | — |
| Expiry date | Jun 13, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6732
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cassette having two side panels, wafer dividers, two retaining combs and a pair of locking collars. Each retaining comb includes an elongated stringer, a hook shaped upper flange at the upper end of the stringer, a hook shaped lower flange at the lower end of the stringer, and a plurality of projections connected to the stringer. The projections are positioned vertically adjacent to one another at spaced apart intervals thereby defining a series of truncated slots. The projections have the same cross-sectional size and shape as the dividers. The retaining combs are operatively coupled to the side panels by means of hook shaped flanges positioned in a pair of complementary notches formed in a top edge and a bottom edge of the side panels. Thus, the retaining combs may slide vertically along the side panels but are prevented from moving laterally, thereby retaining the combs in place except when the retaining combs are moved into an extreme upward or downward position. The locking collars are each attached to one of the side panels immediately adjacent to the notches. Each collar includes a blocking portion that blocks the lateral movement of the upper flanges thereby preventing th…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.