Substrate conveying system
US5640440A · kind A · utility
3Cited by
13References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 1995 |
| Grant date | Jun 17, 1997 |
| Priority date | — |
| Expiry date | Jul 19, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7075
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate conveying system includes an attracting device for attracting a substrate with reduced pressure, a moving device for relatively moving the substrate relative to the attracting device, and a detecting device for detecting the pressure of the attracting device during the relative movement of the substrate to thereby obtain positional information related to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.