Substrate conveying device and method of controlling the same
US5641264A · kind A · utility
6Cited by
11References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1992 |
| Grant date | Jun 24, 1997 |
| Priority date | — |
| Expiry date | Dec 21, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S294/907
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.