Koji Uda
17Patents
13h-index
27Co-inventors
74Inventor score
Filing activity: Feb 14, 1985 → Mar 28, 1995
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5231291A | Wafer table and exposure apparatus with the same | Physics | 90 | Expired |
| US5063582A | Liquid cooled X-ray lithographic exposure apparatus | Physics | 66 | Expired |
| US5182615A | Exposure apparatus | Physics | 59 | Expired |
| US5577552A | Temperature controlling device for mask and wafer holders | Physics | 55 | Expired |
| US5112133A | Alignment system | Electricity | 32 | Expired |
| US5157700A | Exposure apparatus for controlling intensity of exposure radiation | Physics | 30 | Expired |
| US5172402A | Exposure apparatus | Physics | 27 | Expired |
| US5138643A | Exposure apparatus | Physics | 26 | Expired |
| US5028797A | An alignment system for align first and second objects using alignment marks | Physics | 23 | Expired |
| US5377251A | Exposure apparatus | Physics | 22 | Expired |
| US4669867A | Alignment and exposure apparatus | Physics | 18 | Expired |
| US5610965A | Exposure method | Physics | 17 | Expired |
| US5008703A | Exposure apparatus and control of the same | Physics | 16 | Expired |
| US5001734A | SOR exposure system | Physics | 8 | Expired |
| US5641264A | Substrate conveying device and method of controlling the same | Emerging Cross-Sectional Technologies | 6 | Expired |
| US5226523A | Conveying apparatus and method of controlling the same | Physics | 5 | Expired |
| US5459573A | Light quantity controlling apparatus | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.