Patent · US Expired

Test head cooling system

US5644248A · kind A · utility

87Cited by
4References
2Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 22, 1995
Grant dateJul 1, 1997
Priority date
Expiry dateDec 22, 2015

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2886
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention provides a test head cooling system for cooling test heads of a semiconductor IC test apparatus in an enclosed structure. A sealed housing is provided in a test head wherein an air duct is formed in a wall of the sealed box so that cooling air flow effectively. Several thousands of cables are connected to sockets of a plurality of boards. The boards are fixed in board racks by inserting the boards to sockets of the board racks. Gaps between the boards are arranged to provide good ventilation. A cooling pipe is connected to two heat exchangers for circulating cooling medium. A flexible hose for circulating the cooling medium is connected to one of the heat exchangers. The flexible hose is connected to an outside cooling apparatus so as to freely control the temperature of the cooling medium circulating inside the heat exchanger.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.