Aerostatic bearing and method of manufacturing an aerostatic bearing

US5645354A · kind A · utility

Inventors

• Joachim Heinzl · Munich, DE
• Michael Muth · Munich, DE
• Bernd Schulz · Radebeul, DE

Key dates

• Filing date: Sep 25, 1995
• Grant date: Jul 8, 1997
• Expiry date: Sep 25, 2015

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K26/389
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

An aerostatic bearing includes a thin material thickness area having a bearing surface and a back side opposite to the bearing surface, and a plurality of nozzle-forming microholes formed in the thin material layer and having a conical cross-section, with the microholes being drilled with a laser beam applied from the back side, and with the most narrow section of the microholes being located on the bearing surface.