Bernd Schulz
20Patents
8h-index
24Co-inventors
75Inventor score
Filing activity: Feb 2, 1995 → Oct 23, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6767680B2 | Semiconductor structure and method for determining critical dimensions and overlay error | Physics | 27 | Expired |
| US7667842B2 | Structure and method for simultaneously determining an overlay accuracy and pattern placement error | Electricity | 24 | Active |
| US7842442B2 | Method and system for reducing overlay errors within exposure fields by APC control strategies | Physics | 20 | Active |
| US5645354A | Aerostatic bearing and method of manufacturing an aerostatic bearing | Performing Operations; Transporting | 16 | Expired |
| US7099010B2 | Two-dimensional structure for determining an overlay accuracy by means of scatterometry | Electricity | 11 | Expired |
| US6795193B2 | Scatterometer including an internal calibration system | Physics | 10 | Expired |
| US6724096B2 | Die corner alignment structure | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7666559B2 | Structure and method for determining an overlay accuracy | Emerging Cross-Sectional Technologies | 8 | Active |
| US6622579B1 | Bearing arrangement for tension forces and bearing head therefor | Performing Operations; Transporting | 6 | Expired |
| US5564063A | Method for manufacture of at least one micronozzle in an aerostatic bearing | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6765282B2 | Semiconductor structure and method for determining critical dimensions and overlay error | Electricity | 5 | Expired |
| US6816252B2 | Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry | Physics | 3 | Expired |
| US6364002B1 | Heat storage apparatus | Emerging Cross-Sectional Technologies | 2 | Expired |
| US8048390B2 | Method for the selective catalytic reduction of nitrogen oxides in exhaust gases of vehicles | Emerging Cross-Sectional Technologies | 2 | Active |
| US9300126B2 | Electrical apparatus for the short-circuit protection of a three-phase load in a three-phase system | Electricity | 1 | Active |
| US8652426B2 | Use of aqueous guanidinium formate solutions for the selective catalytic reduction of nitrogen oxides in exhaust gases of vehicles | Emerging Cross-Sectional Technologies | 1 | Active |
| US11792944B2 | Valve for pressure compensation and/or for emergency venting of a container, in particular of a container of a battery of an electric vehicle, as well as container with such a valve | Emerging Cross-Sectional Technologies | 0 | Active |
| US10298218B2 | Method and device for controlling an electrical or electronic switching element | Electricity | 0 | Active |
| US8531179B2 | Method and device for the detection of current asymmetries in three-phase circuits | Physics | 0 | Active |
| US11749485B2 | Modular switch apparatus for controlling at least one electric drive | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.