Force microscope and method for measuring atomic forces in multiple directions

US5646339A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Thomas Bayer · Igersheim, DE
• Johann Greschner · Neckartenzlingen, DE
• Martin Nonnenmacher, deceased · Schenefeld, DE

Key dates

• Filing date: Jun 26, 1996
• Grant date: Jul 8, 1997
• Expiry date: Jun 26, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/881
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor (100) is set forth with which a microscope based on atomic forces is constructed and which represents the forces in up to three components. The sensor (100) is designed such that different vibration modes (transversal and torsional) can be induced individually and each mode corresponds to one force direction.