Suspension for micromechanical structure and micromechanical acceleration sensor

US5646347A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Kurt Weiblen · Metzingen, DE
• Michael Offenberg · Lörrach, DE
• Bernhard Elsner · Bad Berka, DE

Key dates

• Filing date: Aug 31, 1995
• Grant date: Jul 8, 1997
• Expiry date: Aug 31, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A suspension or an acceleration sensor having a suspension is proposed, by means of which a micromechanical structure or the acceleration sensor is anchored on a substrate. The suspension takes place by means of lever elements on which an equalizing beam acts. The lever elements are deformed by the stresses in the equalizing beam with respect to the substrate in such a way that the stresses in the microstructure with respect to the substrate are either compensated for or, alternatively, are converted from compressive stresses to tensile stresses or from tensile stresses to compressive stresses.