Scanning electron microscope
US5646403A · kind A · utility
9Cited by
5References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1995 |
| Grant date | Jul 8, 1997 |
| Priority date | — |
| Expiry date | Oct 6, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A stage on which a sample is placed is driven through feed screws rotated by pulse motors which are controlled by a micro-step drive control method. Backlash quantities and feed screw pitch errors have previously been obtained and stored in a memory, and when the stage is to be driven, a stage controller corrects the backlash and pitch errors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.