Maintenance strategy control system and monitoring method for gas discharge lasers
US5646954A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1996 |
| Grant date | Jul 8, 1997 |
| Priority date | — |
| Expiry date | Feb 12, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A diagnostic sub-routine for use by the control system of a gas discharge laser is disclosed. The sub-routine provides a prediction of the time remaining, based upon real-time laser system operations, for each pulse-limited sub-system within the laser. The sub-routine utilizes a calculated average pulse repetition rate over a user-defined time interval as the basis for predicting the time remaining, under current operating conditions, until the end-of-life for each pulse-limited sub-system; and continually updates the time prediction to account for changes in the lasers operation. The predicted time is reported to the operator to allow advanced scheduling of routine maintenance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.