Cymer, LLC
532Patents
253Active
532Granted
56Portfolio score
Filing activity: Sep 30, 1994 → Sep 20, 2023 · 122 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7196342B2 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Physics | 260 | Expired |
| US6128323A | Reliable modular production quality narrow-band high REP rate excimer laser | Electricity | 171 | Expired |
| US6018537A | Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser | Electricity | 161 | Expired |
| US5729562A | Pulse power generating circuit with energy recovery | Electricity | 151 | Expired |
| US6005879A | Pulse energy control for excimer laser | Electricity | 146 | Expired |
| US5978394A | Wavelength system for an excimer laser | Electricity | 145 | Expired |
| US6567450B2 | Very narrow band, two chamber, high rep rate gas discharge laser system | Electricity | 144 | Expired |
| US5991324A | Reliable. modular, production quality narrow-band KRF excimer laser | Electricity | 139 | Expired |
| US5856991A | Very narrow band laser | Electricity | 136 | Expired |
| US6625191B2 | Very narrow band, two chamber, high rep rate gas discharge laser system | Electricity | 136 | Expired |
| US6028880A | Automatic fluorine control system | Electricity | 135 | Expired |
| US6192064A | Narrow band laser with fine wavelength control | Electricity | 135 | Expired |
| US5852621A | Pulse laser with pulse energy trimmer | Electricity | 125 | Expired |
| US6067311A | Excimer laser with pulse multiplier | Electricity | 119 | Expired |
| US6094448A | Grating assembly with bi-directional bandwidth control | Electricity | 112 | Expired |
| US5978391A | Wavelength reference for excimer laser | Electricity | 111 | Expired |
| US5771258A | Aerodynamic chamber design for high pulse repetition rate excimer lasers | Electricity | 110 | Expired |
| US5936988A | High pulse rate pulse power system | Electricity | 107 | Expired |
| US6208675A | Blower assembly for a pulsed laser system incorporating ceramic bearings | Electricity | 106 | Expired |
| US6208674A | Laser chamber with fully integrated electrode feedthrough main insulator | Electricity | 106 | Expired |
| US6104735A | Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly | Electricity | 103 | Expired |
| US6240117A | Fluorine control system with fluorine monitor | Electricity | 102 | Expired |
| US6164116A | Gas module valve automated test fixture | Physics | 102 | Expired |
| US6151349A | Automatic fluorine control system | Electricity | 102 | Expired |
| US6477193B2 | Extreme repetition rate gas discharge laser with improved blower motor | Electricity | 101 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.