High resolution remote position detection using segmented gratings
US5654540A · kind A · utility
30Cited by
2References
29Claims
0Family size
Inventors
Key dates
| Filing date | Aug 17, 1995 |
| Grant date | Aug 5, 1997 |
| Priority date | — |
| Expiry date | Aug 17, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Remote positioning to submicron accuracy is based on comparison of two interference gratings, the first of constant phase, and the second segmented. Positioning corresponds with equal segment-by-segment overlap of an image of one grating superimposed on the other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.