Stuart Stanton
11Patents
7h-index
11Co-inventors
59Inventor score
Filing activity: May 24, 1995 → Jan 10, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5631721A | Hybrid illumination system for use in photolithography | Physics | 131 | Expired |
| US5596413A | Sub-micron through-the-lens positioning utilizing out of phase segmented gratings | Physics | 84 | Expired |
| US5684566A | Illumination system and method employing a deformable mirror and diffractive optical elements | Physics | 67 | Expired |
| US5654540A | High resolution remote position detection using segmented gratings | Physics | 30 | Expired |
| US6469793B1 | Multi-channel grating interference alignment sensor | Physics | 20 | Expired |
| US6177218A | Lithographic process for device fabrication using electron beam imaging | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6528799B1 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6859324B2 | Optical demultiplexer/multiplexer architecture | Physics | 5 | Expired |
| US5891605A | Reduction in damage to optical elements used in optical lithography for device fabrication | Physics | 4 | Expired |
| US7050957B2 | Projection electron beam lithography apparatus and method employing an estimator | Electricity | 2 | Expired |
| US7305333B2 | Projection electron beam lithography apparatus and method employing an estimator | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.