Capacitor, electrode or wiring structure, and semi conductor device
US5654567A · kind A · utility
13Cited by
10References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1996 |
| Grant date | Aug 5, 1997 |
| Priority date | — |
| Expiry date | Oct 1, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B53/00
Abstract
A capacitor, electrode, or wiring structure having an alpha ray emitting source (in particular, a Pt electrode), and an alpha ray shielding layer 18, having at least one type selected from the group of simple metals of nickel, cobalt, copper, and tungsten, their compounds or alloys made of at least two types of these simple metals, and compounds and alloys made of these simple metals and silicon is provided. It is possible to shield off the alpha ray effectively, to suppress generation of soft errors, to enable the use of Pt and other new materials in making the electrodes and wiring, and to reduce the cost of the mold resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.