Technique to improve uniformity of large area field emission displays
US5656886A · kind A · utility
28Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1995 |
| Grant date | Aug 12, 1997 |
| Priority date | — |
| Expiry date | Dec 29, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/319
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Cold cathode passive matrix FEDs are fabricated by depositing a resistive layer on a substrate, and coated with a protective layer in which at least one hole is formed. Cathode material is deposited on the protective layer making direct contact with the resistive layer through the hole to form bases for the emitter tips which are subsequently etched from the cathode layer. The protective layer allows overetching of the cathode material to prevent tip-to-tip electrical shorts without attacking the underlying resistive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.