Modular vacuum system for the treatment of disk-shaped workpieces
US5658114A · kind A · utility
18Cited by
13References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 15, 1995 |
| Grant date | Aug 19, 1997 |
| Priority date | — |
| Expiry date | Feb 15, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.