Patent · US Expired

Poly (aryl ether benzimidazoles) their use capping layers in microelectronic structures

US5660921A · kind A · utility

2Cited by
14References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 23, 1995
Grant dateAug 26, 1997
Priority date
Expiry dateMay 23, 2015

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31721
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A multilevel electronic package comprising at least two levels, each level including a poly(aryl ether benzimidazole), a polymide and copper. A process of preparing this package is disclosed. Several novel poly(aryl ether benzimidazoles) useful in preparing this package are also set forth.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.