Vertical furnace
US5662470A · kind A · utility
378Cited by
7References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1995 |
| Grant date | Sep 2, 1997 |
| Priority date | — |
| Expiry date | Mar 31, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vertical furnace for processing wavers positioned on a support structure. The furnace comprises an inner sleeve, heating means and an outer sleeve. To support the inner sleeve on the support structure a support sleeve is provided engaging with its top and lower part of the inner sleeve and resting with its lower end on the support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.