ASM International N.V.
317Patents
155Active
317Granted
54Portfolio score
Filing activity: Sep 23, 1991 → Jul 23, 2021 · 86 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7754621B2 | Process for producing zirconium oxide thin films | Emerging Cross-Sectional Technologies | 593 | Active |
| US7682657B2 | Sequential chemical vapor deposition | Chemistry; Metallurgy | 579 | Expired |
| US7085623B2 | Method and system for using short ranged wireless enabled computers as a service tool | Emerging Cross-Sectional Technologies | 575 | Expired |
| US6858524B2 | Method of depositing barrier layer for metal gates | Electricity | 570 | Expired |
| US7601223B2 | Showerhead assembly and ALD methods | Chemistry; Metallurgy | 567 | Active |
| US8956971B2 | Selective formation of metallic films on metallic surfaces | Electricity | 543 | Active |
| US7601225B2 | System for controlling the sublimation of reactants | Chemistry; Metallurgy | 541 | Expired |
| US6889864B2 | Source chemical container assembly | Mechanical Engineering; Lighting; Heating | 537 | Expired |
| US8309173B2 | System for controlling the sublimation of reactants | Chemistry; Metallurgy | 536 | Active |
| US9129897B2 | Metal silicide, metal germanide, methods for making the same | Electricity | 533 | Active |
| US7851019B2 | Method for controlling the sublimation of reactants | Chemistry; Metallurgy | 532 | Active |
| US6743475B2 | Process for producing aluminum oxide films at low temperatures | Electricity | 525 | Expired |
| US7824492B2 | Method of growing oxide thin films | Electricity | 523 | Expired |
| US6780704B1 | Conformal thin films over textured capacitor electrodes | Emerging Cross-Sectional Technologies | 518 | Expired |
| US6974781B2 | Reactor precoating for reduced stress and uniform CVD | Electricity | 516 | Expired |
| US7092287B2 | Method of fabricating silicon nitride nanodots | Emerging Cross-Sectional Technologies | 513 | Expired |
| US6481945B1 | Method and device for transferring wafers | Emerging Cross-Sectional Technologies | 503 | Expired |
| US5407449A | Device for treating micro-circuit wafers | Emerging Cross-Sectional Technologies | 493 | Expired |
| US7563715B2 | Method of producing thin films | Electricity | 490 | Expired |
| US6835039B2 | Method and apparatus for batch processing of wafers in a furnace | Emerging Cross-Sectional Technologies | 489 | Expired |
| US7410666B2 | Metal nitride carbide deposition by ALD | Emerging Cross-Sectional Technologies | 479 | Active |
| US7156380B2 | Safe liquid source containers | Emerging Cross-Sectional Technologies | 472 | Expired |
| US6732006B2 | Method and system to process semiconductor wafers | Electricity | 465 | Expired |
| US6981832B2 | Wafer handling system | Electricity | 464 | Expired |
| US8679958B2 | Methods for forming doped silicon oxide thin films | Electricity | 463 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.