Stage assembly for a substrate processing system
US5664926A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1995 |
| Grant date | Sep 9, 1997 |
| Priority date | — |
| Expiry date | Jul 11, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A stage assembly for a substrate processing system including a cassette support assembly for receiving and supporting a cassette and an actuation and support assembly for supporting and moving the cassette and cassette support assembly between a loading position and a processing position. The processing position provides convenient and efficient access by a central processing system, and the loading position preferably places each cassette closer to, and aligned with, a front panel of the processing system for convenient access by an operator. The actuator and support assembly preferably includes a frame assembly and a rotating plate pivotally mounted to the frame assembly, where the cassette support assembly is mounted to the rotating plate for pivoting relative to the frame assembly. An actuator assembly mounted to the frame assembly flits the cassette support assembly between the loading and processing positions. A shaft assembly pivotally mounts the cassette support assembly to the rotating plate. An adjustable linkage assembly is mounted between the frame assembly and the shaft assembly, so that the cassette support assembly is rotated or swiveled by an adjustable amount betwe…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.