Daniel Babbs
46Patents
15h-index
43Co-inventors
81Inventor score
Filing activity: Oct 11, 1994 → May 23, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5853214A | Aligner for a substrate carrier | Electricity | 45 | Expired |
| US6805054B1 | Method, system and holder for transferring templates during imprint lithography processes | Performing Operations; Transporting | 44 | Expired |
| US7090716B2 | Single phase fluid imprint lithography method | Emerging Cross-Sectional Technologies | 43 | Expired |
| US7019819B2 | Chucking system for modulating shapes of substrates | Performing Operations; Transporting | 41 | Expired |
| US5785186A | Substrate housing and docking system | Emerging Cross-Sectional Technologies | 34 | Expired |
| US7636999B2 | Method of retaining a substrate to a wafer chuck | Emerging Cross-Sectional Technologies | 33 | Active |
| US9105673B2 | Side opening unified pod | Emerging Cross-Sectional Technologies | 27 | Active |
| US7292326B2 | Interferometric analysis for the manufacture of nano-scale devices | Physics | 24 | Expired |
| US6326755A | System for parallel processing of workpieces | Electricity | 23 | Expired |
| US7635445B2 | Method of separating a mold from a solidified layer disposed on a substrate | Emerging Cross-Sectional Technologies | 23 | Active |
| US6982783B2 | Chucking system for modulating shapes of substrates | Performing Operations; Transporting | 22 | Expired |
| US6520727B1 | Modular sorter | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6729462B2 | Edge grip aligner with buffering capabilities | Emerging Cross-Sectional Technologies | 21 | Expired |
| US7270533B2 | System for creating a turbulent flow of fluid between a mold and a substrate | Emerging Cross-Sectional Technologies | 21 | Expired |
| US8272827B2 | Reduced capacity carrier, transport, load port, buffer system | Electricity | 16 | Active |
| US7224443B2 | Imprint lithography substrate processing tool for modulating shapes of substrates | Performing Operations; Transporting | 15 | Expired |
| US7798801B2 | Chucking system for nano-manufacturing | Emerging Cross-Sectional Technologies | 13 | Active |
| US8267634B2 | Reduced capacity carrier, transport, load port, buffer system | Electricity | 12 | Active |
| US5664926A | Stage assembly for a substrate processing system | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7531025B2 | Method of creating a turbulent flow of fluid between a mold and a substrate | Emerging Cross-Sectional Technologies | 11 | Expired |
| US9224628B2 | Reduced capacity carrier, transport, load port, buffer system | Electricity | 11 | Active |
| US8328495B2 | Reduced capacity carrier, transport, load port, buffer system | Electricity | 11 | Active |
| US5984116A | Substrate support apparatus for a substrate housing | Electricity | 9 | Expired |
| US7798758B2 | Reduced capacity carrier, transport, load port, buffer system | Electricity | 9 | Active |
| US7630067B2 | Interferometric analysis method for the manufacture of nano-scale devices | Physics | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.