Patent · US Expired

Semiconductor device checking method

US5665610A · kind A · utility

6Cited by
3References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 17, 1996
Grant dateSep 9, 1997
Priority date
Expiry dateMay 17, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2831
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A plated layer made of a metal which is hard to oxidize is formed on the surface of a check electrode of a semiconductor chip which is formed on a semiconductor wafer. A bump of a contactor is caused to come in contact with the check electrode on which the plated layer is formed in the direction perpendicular to the semiconductor chip. Then, a voltage is applied to the bump of the contactor to make a check such as burn-in on the semiconductor chip in a lump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.