Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it

US5665905A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Johann W. Bartha · Aidlingen, DE
• Thomas Bayer · Igersheim, DE
• Johann Greschner · Neckartenzlingen, DE
• Martin Nonnenmacher, deceased · Schenefeld, DE
• Helga Weiss · Eppelheim, DE

Key dates

• Filing date: Jun 7, 1995
• Grant date: Sep 9, 1997
• Expiry date: Jun 7, 2015

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/24926
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for measuring the width of a tip in an Atomic Force Microscope/Scanning Tunneling Microscope using a calibration standard is provided. The method incorporates the steps of providing a tip, measuring the width b1 of a first kind of structure, and measuring the width b2 of a second kind of structure. The steps of measuring comprise the steps of profiling the first and second kinds of structures with a tip and calculating the width of the tip as a function of the measured widths b1 and b2. The calibration standard comprises the first and second kinds of structures and may be, for example, a trench and a raised line which have substantially the same width.