Multiple order dispersive optics system and method of use
US5666201A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 1995 |
| Grant date | Sep 9, 1997 |
| Priority date | — |
| Expiry date | Sep 20, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2866
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.