Ultrasonic wire bonding apparatus and method
US5667130A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1995 |
| Grant date | Sep 16, 1997 |
| Priority date | — |
| Expiry date | Feb 2, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ultrasonic wire bonding apparatus and method is capable of maintaining a sufficient clearance between the horn and bonding surface, and thereby increase the working area without using a long horn. In the ultrasonic wire bonding apparatus, a capillary is located at the front end of a horn for holding a wire that is directly supported at the front end of the horn. The capillary is long enough to maintain a sufficient clearance between the horn and the bonding surface. Alternatively, a capillary, which is located at the front end of a horn for holding a wire, is short and is supported at the front end of the horn through a joint or extension. The total length of the joint and the capillary is enough to maintain a sufficient clearance between the horn and the bonding surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.