Apparatus for adjusting a gas injector of furnace
US5669768A · kind A · utility
3Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 1996 |
| Grant date | Sep 23, 1997 |
| Priority date | — |
| Expiry date | Mar 15, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27D3/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An improved apparatus is provided for adjusting a gas injector of a furnace in connection with oxidation, diffusion and heat treating in semiconductor processing. The apparatus includes a reaction tube for serving as a reaction chamber and heat sink. The gas injector is coupled to the reaction tube on one end and includes openings on the other end for passing source gas. An elongated open tube is secured to the gas injector and has its axis superimposed approximately on the axis of the gas injector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.