Shape memory alloy lift pins for semiconductor processing equipment
US5669977A · kind A · utility
41Cited by
16References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1995 |
| Grant date | Sep 23, 1997 |
| Priority date | — |
| Expiry date | Dec 22, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S156/914
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lift pin arrangement for use in semiconductor processing apparatus wherein the lift pins are of a shape memory alloy. The lift pins exhibit superelasticity and/or shape memory effects which allows the lift pins to withstand substantial bending forces without permanent deformation thereof, and in the case where the lift pins become deformed it is possible to restraighten the lift pins simply by heating the lift pins to an appropriate temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.