Scanning electron microscope and speciman observation method thereby
US5670782A · kind A · utility
17Cited by
4References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 28, 1995 |
| Grant date | Sep 23, 1997 |
| Priority date | — |
| Expiry date | Dec 28, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1534
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An axially symmetric electrode to allow passage of the primary electron beam is installed on the electron beam path inside the magnetic pole of the objective lens so that the primary electron beam passing through the objective lens has a higher energy than the final acceleration voltage. The specimen stage has a sensor to detect the angle of specimen inclination, and the voltage applied to the electrode is decreased or is reduced to zero by a control means if the angle of specimen inclination is too wide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.