Scanning projection optical device
US5673135A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 1996 |
| Grant date | Sep 30, 1997 |
| Priority date | — |
| Expiry date | Dec 10, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning projection optical device is disclosed which can be constructed using relatively small optical members, which employs a catadioptric system that is advantageous to attain a high NA, and which has arc-shaped object and image regions located out of an optical axis and a projecting magnification of 1. In the scanning projection optical device, the catadioptric system is an optical system telecentric in both object- and image- field sections, and has a first, positive power lens-system, a second, substantially non-power lens-system, and a concave mirror; the first, positive power lens-system and the concave mirror cooperatively satisfy Petzval condition to correct field curvature; and without impairing the Petzval condition satisfied by the first lens-system and the concave mirror, the second lens-system corrects aberration of the arc-shaped region centering around the optical axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.