Apparatus for laser machining with a plurality of beams

US5676866A · kind A · utility

Assignees

• Carl Stiftung · DE
• Hewlett-Packard Company, L.P. · US
• Lambda Physik AG · DE

Inventors

• Joachim Schulte in den Baumen · Aalen, DE
• Robert Grub · Westerburg, DE
• Herbert Gross · Santa Ana, US
• Jurgen Schweizer · Balingen, DE
• Hans-Jurgen Kahlert · Göttingen, DE
• Siegfrid Dippon · Gechingen, DE
• Wilhelm Tamm · Aidlingen, DE
• Si-Ty Lam · Pleasanton, US
• Heinrich Endert

Key dates

• Filing date: Apr 14, 1995
• Grant date: Oct 14, 1997
• Expiry date: Apr 14, 2015

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05K2203/107
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

An apparatus for laser machining by creating a plurality of discrete and separate beams which are sent to a deflecting device including a support and a plurality of individual elements that act independently and are individually controlled to machine different points on the workpiece simultaneously.