Lambda Physik AG
152Patents
1Active
152Granted
41Portfolio score
Filing activity: Mar 17, 1983 → Jan 18, 2007 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6219368A | Beam delivery system for molecular fluorine (F2) laser | Electricity | 130 | Expired |
| US5676866A | Apparatus for laser machining with a plurality of beams | Electricity | 78 | Expired |
| US6005880A | Precision variable delay using saturable inductors | Electricity | 58 | Expired |
| US6172329A | Ablated laser feature shape reproduction control | Performing Operations; Transporting | 57 | Expired |
| US5946337A | Hybrid laser resonator with special line narrowing | Electricity | 54 | Expired |
| US6002697A | Diode pumped laser with frequency conversion into UV and DUV range | Electricity | 54 | Expired |
| US6014206A | Stabilization of angular and lateral laser beam position | Electricity | 52 | Expired |
| US6061382A | Laser system and method for narrow spectral linewidth through wavefront curvature compensation | Electricity | 51 | Expired |
| US6804327B2 | Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays | Electricity | 51 | Expired |
| US6160831A | Wavelength calibration tool for narrow band excimer lasers | Physics | 48 | Expired |
| US4916707A | Control circuit for a pulsed gas laser | Electricity | 41 | Expired |
| US6157662A | F.sub.2 (157nm) laser employing neon as the buffer gas | Electricity | 39 | Expired |
| US4534034A | Discharge-pumped laser | Electricity | 38 | Expired |
| US6160832A | Method and apparatus for wavelength calibration | Electricity | 37 | Expired |
| US6389045B1 | Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers | Emerging Cross-Sectional Technologies | 36 | Expired |
| US6243405A | Very stable excimer or molecular fluorine laser | Electricity | 35 | Expired |
| US6393037B1 | Wavelength selector for laser with adjustable angular dispersion | Electricity | 32 | Expired |
| US6580517B2 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp | Electricity | 31 | Expired |
| US6898216B1 | Reduction of laser speckle in photolithography by controlled disruption of spatial coherence of laser beam | Electricity | 30 | Expired |
| US6414438B1 | Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it | Electricity | 30 | Expired |
| US6081542A | Optically pumped laser with multi-facet gain medium | Electricity | 29 | Expired |
| US6212214A | Performance control system and method for gas discharge lasers | Electricity | 28 | Expired |
| US6563853B2 | Gas performance control system for gas discharge lasers | Electricity | 24 | Expired |
| US6493364B1 | Beam shutter for excimer laser | Electricity | 23 | Expired |
| US6490307B1 | Method and procedure to automatically stabilize excimer laser output parameters | Electricity | 22 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.