Patent · US Expired

Method of making a single crystals Ga*N article

US5679152A · kind A · utility

195Cited by
3References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 27, 1994
Grant dateOct 21, 1997
Priority date
Expiry dateJan 27, 2014

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/13
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of making a single crystal Ga*N article, including the steps of: providing a substrate of crystalline material having a surface which is epitaxially compatible with Ga*N; depositing a layer of single crystal Ga*N over the surface of the substrate; and etchably removing the substrate from the layer of single crystal Ga*N, to yield the layer of single crystal Ga*N as said single crystal Ga*N article. The invention in an article aspect relates to bulk single crystal Ga*N articles, such as are suitable for use as a substrate for the fabrication of microelectronic structures thereon, and to microelectronic devices comprising bulk single crystal Ga*N substrates, and their precursor structures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.