Patent assignee · US · COMPANY

ADVANCED TECHNOLOGY & MATERIALS CO., LTD.

637Patents
170Active
637Granted
52Portfolio score

Filing activity: Sep 26, 1986 → Nov 14, 2018 · 113 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6600175B1 Solid state white light emitter and display using same Emerging Cross-Sectional Technologies 618 Expired
US6909839B2 Delivery systems for efficient vaporization of precursor source material Performing Operations; Transporting 567 Expired
US7437060B2 Delivery systems for efficient vaporization of precursor source material Performing Operations; Transporting 539 Active
US8444120B2 Method and apparatus to help promote contact of gas with vaporized material Emerging Cross-Sectional Technologies 529 Active
US8821640B2 Solid precursor-based delivery of fluid utilizing controlled solids morphology Chemistry; Metallurgy 514 Active
US7080545B2 Apparatus and process for sensing fluoro species in semiconductor processing systems Emerging Cross-Sectional Technologies 462 Expired
US7296460B2 Apparatus and process for sensing fluoro species in semiconductor processing systems Emerging Cross-Sectional Technologies 456 Expired
US7475588B2 Apparatus and process for sensing fluoro species in semiconductor processing systems Emerging Cross-Sectional Technologies 454 Expired
US6500487B1 Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions Performing Operations; Transporting 379 Expired
US6749671B2 Abatement of effluents from chemical vapor deposition processes using organometallic source reagents Performing Operations; Transporting 370 Expired
US5362328A Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem Emerging Cross-Sectional Technologies 347 Expired
US6156581A GaN-based devices using (Ga, AL, In)N base layers Emerging Cross-Sectional Technologies 310 Expired
US6445006B1 Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same Emerging Cross-Sectional Technologies 295 Expired
US5972430A Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer Chemistry; Metallurgy 293 Expired
US5874747A High brightness electroluminescent device emitting in the green to ultraviolet spectrum and method of making the same Electricity 259 Expired
US5204314A Method for delivering an involatile reagent in vapor form to a CVD reactor Emerging Cross-Sectional Technologies 252 Expired
US6596079B1 III-V nitride substrate boule and method of making and using the same Electricity 250 Expired
US6423284B1 Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases Emerging Cross-Sectional Technologies 209 Expired
US6292874A Memory management method and apparatus for partitioning homogeneous memory and restricting access of installed applications to predetermined memory ranges Physics 197 Expired
US5453494A Metal complex source reagents for MOCVD Electricity 196 Expired
US5679152A Method of making a single crystals Ga*N article Emerging Cross-Sectional Technologies 195 Expired
US5536323A Apparatus for flash vaporization delivery of reagents Emerging Cross-Sectional Technologies 193 Expired
US5973444A Carbon fiber-based field emission devices Emerging Cross-Sectional Technologies 191 Expired
US5840897A Metal complex source reagents for chemical vapor deposition Electricity 190 Expired
US5711816A Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same Emerging Cross-Sectional Technologies 179 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.