Method and apparatus for determining a location on a surface of an object
US5682242A · kind A · utility
73Cited by
7References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 7, 1995 |
| Grant date | Oct 28, 1997 |
| Priority date | — |
| Expiry date | Aug 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45026
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is proposed for determining a location on an object and for positioning an object, such as a silicon wafer, which has an array of generally perpendicular grid lines on its surface and a plurality of directional features. The method determines the directions of the grid lines relative to the direction of a reference coordinate system, detects a grid junction and detects a direction of one of the plurality of directional features, thereby providing a location of the grid junction in the reference coordinate system. The object is positioned in accordance with the provided location of the grid junction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.